CI-SEMI's in-line, multi-channel wet process analysis system, WetSpec 200 enables non-contact real-time monitoring and closed-loop control of chemical composition in wet process applications. The WetSpec200 is ideal for monitoring, cleaning and etching chemistries. Based on CI-SEMI's novel chemo-metric methodology, the WetSpec200 measures the absorption spectrum in the near infrared (NIR) fast and accurately without labor and waste involved. The system's versatile SW models enable soft-switch between different chemistries. With the capability to monitor up to eight flow cells in parallel, the WetSpec200 provides an efficient, low cost per channel process monitoring. When integrated into a control system, the WetSpec200 enables tighter process control and identifies process excursions before they affect yield.
W e t C h e m i s t r y P r o c e s s M o n i t o r i n g
S y s t e m
F e a t u r e s a n d B e n e f i t s
" In-line, real-time monitoring and characterization of chemical composition of liquids
" No need for chemical sampling or dilution
" Short measurement time and low operational costs
" One analyzer can monitor several measuring cells with different chemistries
" Analysis of complex (multi-component) chemistries
" Real-time measurement enables closed loop control
" Up to 200 meters distance between analyzer and measuring cell enables placement of analyzer in a convenient location
T y p i c a l A p p l i c a t i o n s :
* Other chemistries supported per request
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Distributor in Singapore & Malaysia:
DUSEMUND PTE LTD
High-Tech Solutions
25 International Business Park
#04-103M German Centre
Singapore 609916
Tel: +65 6562 7871
Fax: +65 6562 7872
Mobile: +65 96782568
