Products & Services

Mixing and transferring of slurry chemicals present unique challenges: Slurries are abresive;  suspended particles tend to settle down during storage; some mixtures are foaming. Therefore, in most cases, CMP chemicals need to be recirculated in the drum and eventually prefiltered to remove bigger sized aggregates (e.g. fumed silica) before they are transferred into a day-tank and supplied to the CMP tools.

AS offers a variety of solutions to handle the most challenging slurries.